Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
نویسندگان
چکیده
منابع مشابه
Ultrathin oxide films by atomic layer deposition on graphene.
In this paper, a method is presented to create and characterize mechanically robust, free-standing, ultrathin, oxide films with controlled, nanometer-scale thickness using atomic layer deposition (ALD) on graphene. Aluminum oxide films were deposited onto suspended graphene membranes using ALD. Subsequent etching of the graphene left pure aluminum oxide films only a few atoms in thickness. A pr...
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ژورنال
عنوان ژورنال: ACS Applied Materials & Interfaces
سال: 2019
ISSN: 1944-8244,1944-8252
DOI: 10.1021/acsami.8b21054